ÀÛ¼ºÀÏ : 15-01-20 18:17
2007
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±Û¾´ÀÌ :
Master
Á¶È¸ : 1,822
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Effective removal of Ga residue from focused ion beam using a plasma cleaner, D. S. Ko, Y. M. Park, S. D. Kim, and Y. W. Kim, Ultramicroscopy 107 (4-5), 368 (2007).
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In-situ Electron Microscopy Laboratory 31-411 Dept. of Materials Science and Engineering Seoul National University Gwanak-ro1 Gwanak-gu Seoul, Republic of Korea |
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