HOME > Publications
 
ÀÛ¼ºÀÏ : 15-01-20 17:47
2005
 ±Û¾´ÀÌ : Master
Á¶È¸ : 1,483  
Structural and electrical analysis of silicon thin films deposited by transformer-coupled-plasma chemical-vapor deposition, H. C. Lee, G. Y. Yeom, Y. J. Lee, J. K. Shin, S. Il Baik, and Y. W. Kim,  J Korean Phys Soc 47 (2), 277 (2005).

 
   
 

¼­¿ï½Ã °ü¾Ç±¸ °ü¾Ç·Î1 ¼­¿ï´ëÇб³ 31µ¿ 411È£
½Ç½Ã°£°üÂûÀüÀÚÇö¹Ì°æ ¿¬±¸½Ç
Tel : 02-878-5010  |  Fax : 02-878-5010
COPYRIGHT 2014. ALL RIGHT RESERVED  
In-situ Electron Microscopy Laboratory
31-411 Dept. of Materials Science and Engineering
Seoul National University
Gwanak-ro1 Gwanak-gu Seoul, Republic of Korea
Äü¸Þ´º